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Articles de revue|Publié: 2022

Remote actuation of silicon nitride nanomechanical resonators using on-chip substrate capacitors

Mu Gengyang, Snell Nikaya, Zhang Chang, Xie Xitong, Tahvildari Radin, Weck Arnaud, Godin Michel, St-Gelais Raphael

MICROELECTROMECHANICAL SYSTEMS(2022)29 - 36