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Microfabrication Facility in the Godin Lab


Located in the uOttawa STEM Complexe, the Godin laboratory houses a 250 sq-ft class 1000 cleanroom with access to microfabrication infrastructure. This facility enables the rapid manufucture of microdevices used in our microfluidics research. 

Godin Laboratory - Nanopore array in microfluidic device

Our cleanroom houses the following equipment:

> OAI DUV/NUV mask aligner (model 206) (RESERVE)

> Laurell Spin Coater (RESERVE)

> Glowresearch Autoglow Oxygen Plasma System (10-300 Watt) (RESERVE)

> Atomic Layer Deposition System

> Fumehood, wet etching

> Stereoscope for sample inspection

> Oven, hotplates and other basic tools

Access and use of these facilities must be approved by contacting Michel Godin. Outside users should inquire about possible fees to cover maintenance, consumables and gowning. These fees can be negotiated or waived depending on the nature of the collaboration.


Prior to gaining access, users must be trained for safety and procedures. An approved users list is maintained. Lab safety should always be taken seriously. It is highly recommended that all users understand and manage the risks involved with the work you are performing. The key to safe and productive work is continuous learning: read and understand the data sheets and any other information relevant to the chemicals and devices you are using.


Authorized Internal Users:
You must be trained and pre-approved access the GodinLab cleanroom and to add your bookings to these calendars. New users should email Michel Godin to be able to make reservations. To reserve a timeslot, you must click on the "+ Google Calendar" button at the bottom right of the relevant calendar below. This will lead you to your own Google Calendar account where you can create the reservation event. Be mindful to add your reservations to the right calendar (for the equipment you want).


 Important notice:
No reservation = No permission to work with any equipment in the cleanroom.

CLEANROOM BOOKINGS