Beaulieu, L. Y., Godin, M., Laroche, O., Tabard-Cossa, V., & Grütter, P. (2007). A complete analysis of the laser beam deflection systems used in cantilever-based systems. Ultramicroscopy, 107(4–5), 422–430. https://doi.org/10.1016/j.ultramic.2006.11.001