Journal Articles|Published: 2003
Combined in situ micromechanical cantilever-based sensing and ellipsometry
Godin Michel, Laroche Olivier, Tabard-Cossa Vincent, Beaulieu L Y, Grütter Peter, Williams P J
Review of Scientific Instruments(2003)4902 - 4907
Citation
Godin, M., Laroche, O., Tabard-Cossa, V., Beaulieu, L. Y., Grütter, P., & Williams, P. J. (2003). Combined in situ micromechanical cantilever-based sensing and ellipsometry. Review of Scientific Instruments, 74(11), 4902–4907. https://doi.org/10.1063/1.1614859
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