Journal Articles|Published: 2021
Observation of Silicon Nitride Nanomechanical Resonator Actuation Using Capacitive Substrate Excitation
Mu Gengyang, Snell Nikaya, Zhang Chang, Xie Xitong, Tahvildari Radin, Weck Arnaud, Godin Michel, St-Gelais Raphael
arXiv preprint arXiv:2112.09303(2021)
Citation
Mu, G., Snell, N., Zhang, C., Xie, X., Tahvildari, R., Weck, A., Godin, M., & St-Gelais, R. (2021). Observation of Silicon Nitride Nanomechanical Resonator Actuation Using Capacitive Substrate Excitation. arXiv Preprint arXiv:2112.09303. https://doi.org/10.48550/arXiv.2112.09303
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