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Journal Articles|Published: 2021

Observation of Silicon Nitride Nanomechanical Resonator Actuation Using Capacitive Substrate Excitation

Mu Gengyang, Snell Nikaya, Zhang Chang, Xie Xitong, Tahvildari Radin, Weck Arnaud, Godin Michel, St-Gelais Raphael

arXiv preprint arXiv:2112.09303(2021)