Journal Articles|Published: 2022
Remote actuation of silicon nitride nanomechanical resonators using on-chip substrate capacitors
Mu Gengyang, Snell Nikaya, Zhang Chang, Xie Xitong, Tahvildari Radin, Weck Arnaud, Godin Michel, St-Gelais Raphael
MICROELECTROMECHANICAL SYSTEMS(2022)29 - 36
Citation
Mu, G., Snell, N., Zhang, C., Xie, X., Tahvildari, R., Weck, A., Godin, M., & St-Gelais, R. (2022). Remote actuation of silicon nitride nanomechanical resonators using on-chip substrate capacitors. MICROELECTROMECHANICAL SYSTEMS, 32(1), 29–36. https://doi.org/10.1109/JMEMS.2022.3228188
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